MEUBON
Active Vibration Microscope Laser handheld interferometer MPB05
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Experience Precision with the Active Vibration Microscope Laser Handheld Interferometer:
Revolutionizing Semiconductor Manufacturing: Our Linear Active Vibration Isolation Unit, controlled by linear motors, enhances productivity in semiconductor manufacturing and inspection.
Combining the Best of Both: This active vibration isolator combines the strengths of linear motor control and pneumatic control types, ensuring optimal performance.
Major applications ・Semiconductor Manufacturing Equipment ・Inspection Equipment
Exceptional Vibration Control: Our unique control system delivers outstanding vibration isolation and damping, facilitated by high-thrust linear motors and motion feed-forward control.
Minimal Air Consumption: Benefit from reduced air consumption and superior anti-vibration performance, enhancing overall efficiency in vibration control applications.
Superior Performance: With pre-inputted stage movement information and advanced vibration-damping capabilities, our active unit guarantees superior vibration isolation performance.
Upgrade your laboratory with our Active Vibration Microscope Laser Handheld Interferometer, the pinnacle of precision and productivity.
Actuator: Linear Motor
Control Method:
- FB & FF 6-flexible control
- MFF (Motion Feed-Forward Control)
Leveling System: Automatic Leveling
Controller: Digital Controller
Maximum Loading Weight (kg):
- EST-L6HKP-200L: 340 to 570
- EST-L6HKP-200M: 460 to 670
- EST-L6HKP-200H: 570 to 750
- EST-L8HKP-200: 640 to 1250
Dimensions (mm):
- 315x315 (EST-L6HKP-200L)
- 350x350 (EST-L6HKP-200M)
- Operating Height (mm): 220
Weight (kg):
- 70 (EST-L6HKP-200L)
- 90 (EST-L6HKP-200M)
- Warranty : 5 Years
- Model Number : MP803



